REZI® 78 ash residue remover, J.T.Baker®
Supplier: Avantor
6434-10EA
0
INR
6434-10
6434-09
REZI® 78 ash residue remover, J.T.Baker®
REZI®
J.T.Baker® REZI™-78 IC surface cleaner is an effective etch/ash residue and sidewall polymer removal chemistry for metal and via structures. The product is designed to be environmentally friendly and provides a lower total cost of ownership in most cleaning processes.
- Suitable for BEOL, contact clean and FEOL applications
- Compatible with aluminum, copper, silicon dioxide, nickel silicide, CoWP, and most low-k dielectrics
- Proven capability on bath, spray, and single-wafer tools
- Cleans at lower temperature/shorter time
- Does not contain NMP, Fluoride, Catechol or Hydroxylamine
- Eliminates the need for intermediate solvent rinses resulting in lower cost of ownership.
- Reduces waste treatment costs
Learn more

About VWR
Avantor is a vertically integrated, global supplier of discovery-to-delivery solutions for...